| 摘要 |
PURPOSE:To provide a titled sensor which can stably detect the light emitted by vapor even if said light is slight by adopting cold cathodes as cathode and setting a magnetic field orthogonal with an electric field between the anode and the cathode in a region where electrons bombard a evaporated material. CONSTITUTION:The cylindrical anode is provided around the two disk-shaped cold cathodes 25 and a vapor flow passage 20 penetrates the barrel part of the cylinder. An optical path from a hole 22 for taking out the light P emitted by the evaporated material to an optical introducing pipe 5 is provided. A high voltage is kept impressed between the cathodes 25 and the anode 27 from a power source 7. The magnetic field B is set in the axial direction of said cylinder by a permanent magnet 3 on the outside of the anode 27. Since the electric lines of force heading toward the anode 27 from the cathodes 25 are generated as shown, the electrons which have the direction component orthogonal with the magnetic field B among the flying electrons emitted from the cold cathodes swirl around the magnetic lines B of force and bombard the evaporated material M entering from the passage 20. The chances of the bombardment increase considerably as compared to the case in which are no magnetic fields B. The strong emitted light P specific to the evaporated material is generated even if the electrons generated from the cathodes 25 are slight.
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