| 摘要 |
PURPOSE:To carry out the operation of a valve body slowly by making a damper chamber of the space on the electromagnetic solenoid side being partitioned by a diaphragm while forming small holes in the diaphragm or the valve body. CONSTITUTION:A diaphragm 7 partitions the pace 14 on an electromagnetic solenoid side and the space 15 on a valve block 10 side, and small throttle holes 16 are formed in the diaphragm 7. These small throttle holes 16 perform a flow restricting action, thus the space 14 on the solenoid side constitutes a damper chamber. When a valve body 5 operates in the axial direction, since the small throttle holes 16 are formed in the diaphragm 7, the operating speed of the valve body 5 is reduced. Even if the throttle small holes 16 are formed in the valve body 5, the same effect can be achieved.
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