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发明名称
MANUPACIURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6388847(A)
申请公布日期
1988.04.19
申请号
JP19860234842
申请日期
1986.10.01
申请人
MITSUBISHI ELECTRIC CORP
发明人
KISHIMOTO SATORU
分类号
H01L21/60
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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