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发明名称
PRODUCTION EQUIPMENT FOR SEMICONDUCTOR
摘要
申请公布号
JPS6364350(A)
申请公布日期
1988.03.22
申请号
JP19860210320
申请日期
1986.09.04
申请人
MITSUBISHI ELECTRIC CORP
发明人
ISHIHARA KAORU
分类号
H01L23/50
主分类号
H01L23/50
代理机构
代理人
主权项
地址
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