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发明名称
METHOD OF MEASURING SURGE VOLTAGE IN PLASMA
摘要
申请公布号
JPS6343298(A)
申请公布日期
1988.02.24
申请号
JP19860185537
申请日期
1986.08.06
申请人
NEC CORP
发明人
NAGAO YUTAKA;OKANO YASUNOBU
分类号
H05H1/00;H01L21/66
主分类号
H05H1/00
代理机构
代理人
主权项
地址
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