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发明名称
MANUFACTURE OF NITRIDE FILM
摘要
申请公布号
JPS6320837(A)
申请公布日期
1988.01.28
申请号
JP19870132005
申请日期
1987.05.29
申请人
INTERNATL BUSINESS MACH CORP <IBM>
发明人
FUORUKAA GURAFU;SEODOA OSUKAA MOORU;PETERU REO BUTSUHAMAN;PETERU BUETEIGAA;PIITAA DEEBITSUDO HOU
分类号
H01L21/033;H01L21/285;H01L21/311;H01L21/318;H01L21/336;H01L21/338;H01L29/812
主分类号
H01L21/033
代理机构
代理人
主权项
地址
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