发明名称 CAPACITIVE PRESSURE TRANSDUCERS
摘要 Described herein are a capacitive pressure detector, with an electrically conductive substrate (1), an electrically conductive, plate-like member (3) disposed at a distance from the substrate, and an electrically insulating layer (2') hermetically bonding together the substrate (1) and the member (3) such that a capacitor chamber is formed between the substrate (1) and the member (3), as well as a method for manufacturing same. The method comprises machining at least one recess (5) into one side of the substrate (1), applying a layer (2) of electrically insulating material in molten state onto the machined side of the substrate (1) such that the layer (2) covers the machined side of the substrate, allowing the layer (2) to harden, remowing material out of the surface of the structure in this way produced for obtaining a substantially plane surface with at least one conductive mesa portion (6) of the substrate (1) surrounded by at least one insulating layer portion (2').
申请公布号 GB2159957(B) 申请公布日期 1988.01.20
申请号 GB19850013788 申请日期 1985.05.31
申请人 * VAISALA OY 发明人 ARI * LEHTO
分类号 G01L9/12;C07K14/755;G01L;G01L9/00;(IPC1-7):G01L9/12 主分类号 G01L9/12
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