| 摘要 |
<p>PURPOSE:To stabilize the sensitivity characteristic of a sensor for bulk material or the like, by a method wherein a groove is arranged at an opening peripheral portion of a support to have a step at an internal circumference-side edge portion with respect to an open surface and a piezo-electric vibrator is elastically bonded on the edge. CONSTITUTION:A circumferential groove 14 is formed at an opening peripheral portion of one end of a support case 11 in such a manner as to have a step at an internal circumference-side edge portion 12 with respect to an open surface 13 of the case 11. The groove section 14 is filled with an elastic adhesive 15 comprising silicone resin or the like and a diaphragm 17 of a piezo-electric vibrator 16 is placed on the edge portion 12 with the peripheral portion 18 extending over the groove section 14 and fastened elastically.</p> |
