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发明名称
VACUUM SPUTTERING APPARATUS
摘要
申请公布号
GB2160898(B)
申请公布日期
1987.12.31
申请号
GB19850013672
申请日期
1985.05.30
申请人
* DOWTY ELECTRONICS LIMITED
发明人
ROGER GEORGE * DUCKWORTH;MOHAMMED NAZIM * KHAN;DONALD ALISTAIR * RUTHERFORD
分类号
C23C14/34;C23C14/56;H01J37/18;H01J37/34;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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