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发明名称
PREPARATION OF SAMPLE WHOSE CROSS-SECTION IS TO BE OBSERVED PARTLY
摘要
申请公布号
JPH0661320(A)
申请公布日期
1994.03.04
申请号
JP19910134712
申请日期
1991.06.06
申请人
MITSUBISHI ELECTRIC CORP
发明人
HIROSE YUKINORI
分类号
H01J37/26;H01L21/66;(IPC1-7):H01L21/66
主分类号
H01J37/26
代理机构
代理人
主权项
地址
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