发明名称 JIG WITH WHEEL FOR TREATING SEMICONDUCTOR WAFER
摘要 PURPOSE:To reduce dusts by using a wheel unit in which wheels and an axle are integrated, and eliminating looseness of the wheels to improve the straight travelling property. CONSTITUTION:A wheel unit 16 provided integrally with wheels 15 near both ends of an axle 14 having a length substantially equal to the width of a bearing housing 11 is contained removably from the hole 12 of a bottom wall in the housing 11, and the both ends of the axis 14 are rotatably engaged with the bearings 13 at both side walls. The unit 16 contained in the housing 11 is prevented from removing from the housing 11 by a wheel removal preventive plate 18 removably inserted from the square-shaped hole 17 provided at the lower side wall at the rear of the housing 11, and a projection 19 engaged partly with the hole 12 is provided to prevent it from horizontally moving. Since the wheels and the axle are integrated in the wheel unit, excellent straight traveling property is provided, and dusts can be reduced.
申请公布号 JPS62259433(A) 申请公布日期 1987.11.11
申请号 JP19860102298 申请日期 1986.05.02
申请人 TOSHIBA CERAMICS CO LTD 发明人 TANAKA TAKASHI;SATO SHUNKICHI
分类号 H01L21/22;H01L21/67;H01L21/673;H01L21/68 主分类号 H01L21/22
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