A wafer processing system including wafer handling arms incorporated into vacuum isolation valves is described. A loadlock with elevator and optical sensors is used to inventory and position a cassette of wafers. The wafers in the cassette can be randomly accessed. A computer is used to control the system according to a task status table independent of time sequence.
申请公布号
US4705951(A)
申请公布日期
1987.11.10
申请号
US19860853274
申请日期
1986.04.17
申请人
VARIAN ASSOCIATES, INC.
发明人
LAYMAN, FREDERICK P.;HUNTLEY, DAVID A.;DICK, PAUL H.;COAD, GEORGE L.;KUHLMAN, MICHAEL J.;VECTA, ROGER M.;HOBSON, PHILLIP M.