| 摘要 |
PURPOSE:To improve the flatness of a crystal by providing a camera, etc., for reading an RHEED pattern during crystal growth, recognizing the image by a computer, and controlling the growth on the atomic level. CONSTITUTION:The device for growing a crystal consists of the camera 4, the image recognizing computer 5, and a shutter 8 for the raw material heating crucible 7. The RHEED pattern during the growth of the crystal on the crystal growth substrate is read by the camera 4. The read image is analyzed by the computer 5. The shutter 8 is controlled on the basis of the analysis result, and a flat growth film is produced on the atomic level.
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