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发明名称
HOLDER DEVICE FOR SUBSTRATES IN VACCUM DEPOSITION APPARATUS
摘要
申请公布号
GB2156861(B)
申请公布日期
1987.10.14
申请号
GB19850006702
申请日期
1985.03.15
申请人
* LEYBOLD-HERAEUS GMBH
发明人
PETER * MAHLER
分类号
C23C14/50;(IPC1-7):C23C14/50
主分类号
C23C14/50
代理机构
代理人
主权项
地址
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