发明名称 VACUUM TREATING DEVICE
摘要 PURPOSE:To simplify the operation of the title device by connecting a heating means provided to a sample holder to an electric power source in series through a magnetic induction-type switch, and furnishing a magnetic means for actuating the switch at a site corresponding to a part to be heated. CONSTITUTION:The sample holder 40 is rotated by 1/6 of rotation by the operation of a driving gear 34, hence samples 50 are successively held by the sample holder 40, and the samples 50 are successively treated in treating chambers I-V. In this case, since permanent magnets 62 are provided at the sites corresponding to the treating chambers II-V, respective magnetic induction-type lead switches 61 are operated when the sample holders 40 arrive at the sites corresponding to the treating chambers II-V, and respective IR radiation heaters 60 begin to be energized. Consequently, the sample 50 held by the sample holder 40 is heated to a specified temp., and specified treatment is carried out in the respective treating chambers II-V.
申请公布号 JPS62234539(A) 申请公布日期 1987.10.14
申请号 JP19860076543 申请日期 1986.04.04
申请人 HITACHI LTD 发明人 KANAI SABURO
分类号 B01J3/00;C23C14/56;H01L21/205;H01L21/302;H01L21/31 主分类号 B01J3/00
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