DEFECT RECOGNIZING METHOD

摘要

PURPOSE:To inspect a defect easily at a high speed by recognizing the defect on the basis of the label value at the end part of a labeled image or the label value and a label value present in the image. CONSTITUTION:Image input processing 1 picks up a circuit pattern by an image pickup means to obtain an input image and binary coding processing 2 converts the input image into a binary signal to obtain the binary-coded image of the circuit pattern. Labeling processing (1) 3 labels the circuit pattern part of the binary-coded image and peripheral part label extraction processing (1) 4 extracts label values of two end parts where the circuit pattern part is absent. Label collation processing (1) 5 collates the label values of the two end parts with each other to detect labels of an island and a wire breaking part. If there is only a circuit pattern part extending from one end to the other end in an image surface, the labels used when the circuit pattern part is labeled after the binary coding of the circuit pattern appear at image surface ends correspondingly without fail and if the circuit pattern part has a defect, it can not be considered to be a circuit extending from one end to the other end of the image surface.