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发明名称
THIN FILMS
摘要
申请公布号
GB2184747(A)
申请公布日期
1987.07.01
申请号
GB19860030154
申请日期
1986.12.17
申请人
THE * GENERAL ELECTRIC COMPANY P L C
发明人
IAN ROBERT * PETERSON;IAN ROBERT * GIRLING
分类号
H01L21/312;H01L21/316;(IPC1-7):C25D11/02;C25D9/00
主分类号
H01L21/312
代理机构
代理人
主权项
地址
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