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发明名称
摘要
申请公布号
JPS6228578(B2)
申请公布日期
1987.06.22
申请号
JP19780023086
申请日期
1978.02.28
申请人
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
发明人
MATSUMOTO TAKASHI;NAWATA TAKAHARU
分类号
H01L21/76;H01L21/308;H01L21/311;H01L21/3115;H01L21/32;H01L21/762
主分类号
H01L21/76
代理机构
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