发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要 PURPOSE:To visually determine the capacity of a condenser easily by a method wherein capacity displaying marks are made on a semiconductor substrate to form metallic electrodes on a dielectric layer corresponding to the capacity displaying marks. CONSTITUTION:After forming an oxide film 2 on an Si substrate 1, capacity displaying marks 5a, 5b, 5c are made together with a dicing line 3 on a predetermined location. Next, respective capacity displaying marks 5a-5c are made on the Si oxide film 2 to form metallic electrodes 4 corresponding to the specified arrangement lines of these capacity displaying marks 5a-5c. Resultantly, condensers with different positions of electrode patterns can be formed to visually discriminate the condensers with different capacity easily.
申请公布号 JPS62133749(A) 申请公布日期 1987.06.16
申请号 JP19850275539 申请日期 1985.12.05
申请人 MITSUBISHI ELECTRIC CORP 发明人 TANIGUCHI AKIHISA
分类号 H01L27/04;H01L21/822 主分类号 H01L27/04
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