| 摘要 |
<p>PURPOSE:To shorten regeneration time of an adsorber by sensing the temp. of a process line in a downstream of the adsorber and adjusting the divergence of a valve for changeover of the adsorber so that the sensed temp. is not exceeded over a specified allowable value. CONSTITUTION:Gaseous He compressed by a compressor 1 is heat-exchanged for liquid N2 in a heat exchanger 2, cooled and introduced to an adsorber 3 to adsorb and remove the impurities. A temp. measuring point 23 is provided to the downstream of the adsorber 3 and the downstream of a by-pass line. The divergence of the valves 7, 8, 9 is adjusted so that this temp. is not exceeded over an allowable value. The regeneration of the adsorber is performed by closing the valves 7, 8, opening the valve 9, utilizing the by-pass line, flowing gaseous He at ordinary temp. through a heating line 14, opening a valve 16, and decompressing the adsorber 3 by means of a vacuum pump 17.</p> |
