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发明名称
Aus Silizium geätzter Kraftaufnehmer und Verfahren zu seiner Herstellung.
摘要
申请公布号
DE69005502(D1)
申请公布日期
1994.02.10
申请号
DE1990605502
申请日期
1990.01.15
申请人
FORD-WERKE AG, 50735 KOELN, DE
发明人
SICKAFUS, EDWARD NATHAN, GROSSE ILE, MICHIGAN 48138, US
分类号
G01P15/08;G01P15/097;G01P15/10;G01P15/13;(IPC1-7):G01L1/00;G01L1/10
主分类号
G01P15/08
代理机构
代理人
主权项
地址
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