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发明名称
RUNNER SEPARATOR
摘要
申请公布号
JPS6218045(A)
申请公布日期
1987.01.27
申请号
JP19850157291
申请日期
1985.07.16
申请人
MITSUBISHI ELECTRIC CORP
发明人
TONE YOSHIMORI
分类号
H01L21/56
主分类号
H01L21/56
代理机构
代理人
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