| 摘要 |
PURPOSE:To always execute a prescribed working even if a working condition is varied in the course of working, by providing an AE detecting sensor on a body to be worked or a fixing table of the body to be worked, discriminating its detecting signal, and controlling an optical oscillation from an oscillator. CONSTITUTION:A laser beam 6 oscillated by an oscillator 3 is intermitted by a chopper 4 and made pulsative, focused by a lens 5 and irradiated to a working part of a body to be worked 1 and working is executed. The laser beam 6 collides with the body to be worked 1 and generates AE, and it is propagated through the body to be worked 1 and detected by an AE sensor 7. This detecting signal is compared and discriminated by a control device 8. A comparison reference value is compared by storing in advance an acoustic pressure, a frequency characteristic, a high frequency component, etc. of the time when a beam output is correct. By sending a control signal to the oscillator 3, based on this comparison/discrimination result and executing a control, working can be executed without changing an initial set state in the course of working. |
