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发明名称
DICING DEVICE
摘要
申请公布号
JPS61293811(A)
申请公布日期
1986.12.24
申请号
JP19850134173
申请日期
1985.06.21
申请人
HITACHI MICRO COMPUT ENG LTD;HITACHI LTD
发明人
YASUI KIYOSHI;SHIMIZU YOSHIHARU
分类号
B28D5/00;H01L21/301;H01L21/78
主分类号
B28D5/00
代理机构
代理人
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