| 摘要 |
PROBLEM TO BE SOLVED: To provide a grinding device capable of grinding a workpiece to a uniform finish thickness.SOLUTION: A grinding device is configured to grind a workpiece 11, and includes: grinding means 10 including a chuck table 46 having a conic holding surface 68a for holding the workpiece 11 and including a conic shaft of the holding surface 68a as a rotary shaft 46a, a spindle 21 driven to rotate, and a grinding wheel 24 mounted at a tip of the spindle 21, and grinding a grinding region of the workpiece 11, held on the chuck table 46, from the center to the outer periphery of the holding surface 68a; load current value detecting means of detecting a load current value of the spindle 21; tilt changing means of changing the tilt of the chuck table 46; and control means of controlling the tilt changing means based upon the load current value detected by the load current value detecting means. |
