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发明名称
GAS GATE BETWEEN CHAMBERS FOR SEMICONDUCTOR MANUFACTURE
摘要
申请公布号
AU556804(B2)
申请公布日期
1986.11.20
申请号
AU19830017646
申请日期
1983.08.05
申请人
ENERGY CONVERSION DEVICES INC.
发明人
JOACHIM DOEHLER;DAVID ATTILIO GATTUSO;KEVIN RICHARD HOFFMAN
分类号
H01L31/18;(IPC1-7):H01L31/18
主分类号
H01L31/18
代理机构
代理人
主权项
地址
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