| 摘要 |
PURPOSE:To prevent the damage and deformation of a metallic electrically conductive film in the pretreatment of electrocasting by treating the film by etching or plasma in a reducing gaseous phase and removing the oxide formed on the metallic conductive film. CONSTITUTION:Dry etching or plasma treatment is carried out as the pretreatment of electrocasting. When a high-frequency voltage is impressed on an electrode 11 by a high-frequency electric power source 12, plasma P by glow discharge is generated between the wall surface and a metallic cylinder 8 in an etching vessel 7. A highly chemically reactive neutral radical is excited in gaseous Co, H2, etc., the radical reacts with the oxide on the surface of a metallic electrically conductive film 5 and the oxide is converted into a volatile substance and removed. Consequently, the damage and deformation of the conductive film 5 due to an acid is prevented and a metallic mold having excellent transfer property and durability can be obtained.
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