| 摘要 |
PURPOSE:To obtain a stamper having an extremely good signal transfer characteristic without damaging a metallic conductive film by forming a protective film for preventing oxidation on the metallic conductive film. CONSTITUTION:The protective film 6 for preventing oxidation is formed on the metallic conductive film 5 laminated on the resist film 2 of a substrate 1. Materials having the potential lower than the potential of the film 5 in standard electrode potential, for example, iron, magnesium, etc. are used for the film 6. Such multi-layered plate 7 is immersed in a pretreating liquid and the prescribed potential is applied to the film 5 and the film 6 to elute the film 6 and thereafter the plate is subjected electroforming, by which a stamper base material 16 is formed. The film 5 is then stripped from the resist film 2 and the stamper 17 is obtd. The damage of the film 5 by oxidation when the substrate is dipped in the treating liquid is thus obviated and the stamper 17 having the extremely good signal transfer characteristic is obtd.
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