| 摘要 |
PURPOSE:To prevent or decrease in the process of bonding the displacement between the capillary and the ITV camera and prevent bonding errors, by performing wire bonding with the cooled bonding arm. CONSTITUTION:The bonding arm 7 is cooled in the process of wire bonding. It is especially effective to interlock the cooling of the bonding arm with the heater input of the wire bonding equipment. For cooling means, the air cooling is adopted. A long nozzle 13 is installed in the longitudinal direction of the bonding arm and blows air against the bonding arm 7 with 30l/M flow rate, for example. Application of nitrogen or inactive gas to cooling can prevent the oxidization of the bonding arm and bonding surface, so that good quality (strength) of bonding can be obtained. It is preferable to install a cock in the upstream side of flow path of the nozzle 13 and interlock this cock with the heater input. In case the cock is constituted by the electromagnetic valve, for example, its operation can be easily controlled. |
