| 摘要 |
PURPOSE:To obtain the titled good-quality film resemblant to natural diamond by introducing a gaseous reactant contg. hydrocarbons into a reaction vessel wherein a substrate is arranged, and irradiating UV light on the gaseous reactant. CONSTITUTION:A substrate is arranged in a reaction vessel which is used in a common chemical vapor-phase growth method. An org. material (e.g., polyethylene), an inorg. material (e.g., ceramic), and a composite material are used as the material of the substrate. Then a gaseous reactant contg. at least one kind of hydrocarbon is introduced into the reaction vessel. A comparatively low mol.wt. hydrocarbon having an unsaturated bond (e.g., ethylene) is appropriately used as the hydrocarbon. Subsequently, UV light is irradiated on the gaseous reactant to excite and decompose the hydrocarbon. The hydrocarbon in the gaseous reactant is excited and decomposed to form active chemical species, which are successively deposited on the surface of the substrate to form a diamond film or a diamond-like carbon film.
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