| 摘要 |
<p>PURPOSE:To keep high accuracy over a wide characteristic range, by providing an operational processing part for operating the feedback current supply electric energy to the heat generation element in a feedback current supply control loop and outputting a current supply signal matched with the characteristic of a flowing fluid. CONSTITUTION:An operational processing part 8 constituted of a microprocessor takes in the digital signal output of an A/D converter part 7 and operates the feedback current supply electric energy to a heat generation element 1a corre sponding to the temp. of a flowing fluid to output a feedback current supply control signal. the temp. TH of the heat generation element 1a and the temp. TC of a temp. compensation element 2a are taken in the operational processing part 8. PID control is performed in the operational processing part 8 so as th keep TH-TC always constant.</p> |
