OBJECTIVE OPTICAL SYSTEM, ABERRATION MEASURING INSTRUMENT AND EXPOSURE DEVICE

摘要

PROBLEM TO BE SOLVED: To obtain an objective optical system which has a numerical aperture larger than 1 and whose aberration is satisfactorily corrected.

SOLUTION: The objective optical system is equipped with: a first optical member (31a) having nearly plane parallel form; a second optical member (31ba) turning its convex surface to an emitting side and having positive refractive power; a positive lens group (31bb); and a negative lens group (31bc) in order from an object side. An optical path between the first optical member and the second optical member is filled with a medium (Lm3) having a refractive index larger than the maximum numerical aperture on the incident side of the objective optical system.

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