| 摘要 |
PURPOSE:To obtain an element of high sensitivity and high reliability by forming a glass film on a substrate consisting of mica and forming thermosensitive materials on this glass film. CONSTITUTION:A glass film 2 is formed on a substrate 1 formed by cleaving mica. Thermosensitive materials 3 for a thermistor, a thermopile, a pyroelectric element, or the like are formed on this film 2. Since the glass film 2 is formed on the thin mica substrate 1 in this constitution, peeling of mica is lessened by the adhesive force of the glass film 2 in comparison with only mica, and the element which has small heat capacity and a high sensitivity and a high reliability is obtained. |
