EPITAXIAL GROWER WITH MOLECULAR BEAMS

摘要

PURPOSE:A vessel for feeding a substance to be vaporized is demountably set over the molecular beam cell and the substance which is dropped into the cell is vaporized again to deposit around the feeding vessel whereby the impurities of the surface of the substance to be vaporized is removed in high efficiency to shorten the time for purification. CONSTITUTION:A chamber 2 for containing a molecular beam cell is set beneath the crystal growth chamber 1 so that they are passable to each other. A crucible 3 equipped with heater 4 is set in the chamber 2 and a conical vessel 5 for feeding the substance to be vaporized is set above the crucible 3 demountably. When the crucible 3 is heated, the substance to be vaporized 8 is melted in the feeder 5 and drips through the small hole 6 into the crucible 3. The falling substance 8 is vaporized again in the crucible 3 with that to adhere to the outer wall surface of the feeder 5. The deposit becomes particle and the diameter of the particles becomes larger and the substances drips again by its self- weight ito the crucible. The repitition gives the high-purity vaporizing substance.