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发明名称
Verfahren zur Herstellung von Siliziumnitridschichten
摘要
申请公布号
CH490514(A)
申请公布日期
1970.05.15
申请号
CH19670008740
申请日期
1967.06.20
申请人
N. V. PHILIPS' GLOEILAMPENFABRIEKEN
发明人
GEORGE WILKES,JOHN;EDWIN BRADSHAW,STANLEY;ROBERT BADCOCK,FRANK
分类号
H01L21/318;(IPC1-7):C23C11/14;H01L7/34
主分类号
H01L21/318
代理机构
代理人
主权项
地址
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