| 摘要 |
PURPOSE:To enable an oscillator to oscillate effectively up to max. repetition frequency by a method wherein optimum running speed of gas fluid is provided to a pulse-laser oscillator in high repetitive operation by means of zero dimen sion running speed of gas fluid parameter. CONSTITUTION:Running speed of gas fluid parameter xsi is defined as xsi=vg/(f+l). But (f) regards as repetition frequency [l/sec], (l) regards as length [m] measured distance of segment mentioned below in parallel to gas fluid 5. An upstream edge of discharge generated at most upstream side against laser gas fluid among main discharge 14 and auxiliary discharge 13a, 13b regards as a initial point 25, and downstream edge in gas fluid of the main discharge 14 direction regards as a terminal point 26. Then the distance of segment is from the point 25 to the point 26. Also, (vg) regards as mean value [m/sec] of running speed of laser gas between the initial point 25 and the termi nal point 26. If laser gas is circulated so that xsi>=1 is satisfied using the running speed of gas fluid parameter xsi, any pulse-laser oscillator can be subjected to oscillate effectively. |
