| 摘要 |
PURPOSE:To obtain an ultra small size element by focusing a laser beam on a substrate in a reactive gas ambient and rotating or linearly moving the substrate or focusing point of laser beam. CONSTITUTION:A chamber 1 is exhausted 2, a reaction gas 4 is supplied thereto in order obtain gas ambient and a laser beam is focused in size of several muto a substrate 9 through a lens 11. Position of substrate can be controlled by driving 10 a shaft 8 which can rotate and move straight. The reaction gas generates photo-chemical reaction or thermally decomposes at the laser beam focusing point, a metal component geraminates from the focusing point and grows like a line along the irradiating direction of laser beam. When the substrate 9 moves downward while it is rotated at an adequate speed on the horizontal plane, an ultra small spiral element in the diameter of several hundreds mucan be obtained. |
