| 摘要 |
PURPOSE:To position orientation flats precisely by mounting a table, on which wafers being carried are placed concentrically, and a detector, etc. detecting the orientation flats in a noncontacting manner. CONSTITUTION:A wafer 10 being carried in the direction of the arrow 60 by a belt 20 is stopped concentrically to a table 40 by a stopper. The table 40 is elevated to the level or higher of the belt 20 by a table cylinder 41 under the state, and rotated by a turning gear 42. When an orientation flat 11 reaches a position shown in the figure by the revolution of the turning gear, beams each emitted from light-emitting elements 43a, 43b are not received severally by light-receiving elements 44a, 44b, and beams emitted from a light-emitting element 43c are received by a light-receiving element 44c, thus deciding the positioning of the orientation flat 11 to be completion, then stopping the revolution of the table 40. |
