发明名称 APPARATUS FOR MANUFACTURING SEMICONDUCTOR
摘要 <p>PURPOSE:To prevent a heat block structure from complicating by mounting an upper plate on the upper surface of a heat block body, and forming a hole capable of engaging a heat element on the upper plate. CONSTITUTION:A heat block 19 has a metal heat block body 20 buried with a heater 21, and is secured to the upper end of elevationally movable shaft 22. Upper plates 33 made of metal plate are integrally mounted by bolts 24 on the upper surface of the body 20. A rectangular element hole 25 is formed substantially at the center of the plate 23 to engage and support a heating element 26. When a lead frame 18 is stopped at the prescribed position, the block 19 is moved upward by the shaft 22, the tab 18a of the frame 18 is engaged within the hole 25, and the lower surface is contacted with the element 25.</p>
申请公布号 JPS6129141(A) 申请公布日期 1986.02.10
申请号 JP19840149498 申请日期 1984.07.20
申请人 HITACHI LTD 发明人 YAMAZAKI ISAMU;WATANABE KENJI
分类号 H01L21/60 主分类号 H01L21/60
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