| 摘要 |
PURPOSE:To form a convex lens array in response to a photoelectric conversion element group by coating a main surface with a first transparent resin layer and a second resin layer, removing the second resin layer in a section corresponding to the conversion element group and diffusing a third transparent resin into an opening section for the second resin layer. CONSTITUTION:Photoconductive conversion regions 11 consisting of devices such as photodiodes are arranged to the main surface of a semiconductor substrate 10, and vertical CCD registers and transfer gate regions are light-shielded by layers 13. A CCD image pickup device is shaped to the main surface 10 of the semiconductor substrate, and coated with a hydrophobic resin layer 14, and bonding pads for the image pickup device and the resin layer 14 on a scribing line are removed. The resin layer 14 is coated with a resin layer 15 in which potassium dichromate is mixed to a hydrophilic resin as a photosensitizer, and the hydrophilic resin layers 15 in sections 16 corresponding to the photoelectric conversion regions 11 are removed by a photochemical reaction. Transparent hydrophobic dyes 17 are heat-transferred and dyed. The hydrophobic resin layers in sections to which dyes 17 are dyed are formed to a projecting section shape by cubical expansion. |
