| 摘要 |
PURPOSE:To take a high-precision measurement securely by arraying plural linear image sensors across an optical branching means without any gap, and reading the output of one of two image sensors which overlap each other in the overlap range of sensors. CONSTITUTION:Outputs of photodetection cells Di+1-Dj-1 in the shade where an image sensor 1 overlaps with photodetection cells G1-Gm, K1-Kl in the shade of image sensors 2 and 3 are added together and displayed to measure the external diameter of a body 5 to be measured. Further, the linear image sensors 1-3 are arranged across a half-mirror 7 without any gap to obtain a secure measured value even when the object has a relatively large diameter or shifts in position. |
