发明名称 Method of making an isolating pocket by means of a junction in a semiconductor slice
摘要 The invention relates to a method of forming the walls of an isolating pocket of the P<+> type inside a semiconductor slice 10. In order to form this pocket, aluminium 12 is deposited on the silicon, an aluminium/silicon micro-alloy 16 is formed by laser beam 14 following the outline of the pocket to be made. Then, after elimination of the non-alloyed aluminium, a heat treatment under oxygen is carried out in order to ensure the deep diffusion of the aluminium inside the silicon. This P<+> type diffusion constitutes the wall of the desired pocket. <IMAGE>
申请公布号 FR2569492(A1) 申请公布日期 1986.02.28
申请号 FR19840013192 申请日期 1984.08.24
申请人 SILICIUM SEMICONDUCTEUR SSC 发明人 FRANCOIS POULIN
分类号 H01L21/225;H01L21/268;H01L21/761;(IPC1-7):H01L21/76 主分类号 H01L21/225
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