发明名称
摘要 A wafer (1) on which is formed a layer of thin film as an interconnection system (3) with contact sites (2, 7) between the interconnection system (3) and die bonding sites (2) of the wafer (1) to form a monolithic wafer. The interconnection system (3) has bonding sites on the surface of the wafer (1) to which chips are bonded to form a hybrid monolithic wafer system.
申请公布号 JPS60502234(A) 申请公布日期 1985.12.19
申请号 JP19850500707 申请日期 1984.09.12
申请人 发明人
分类号 H01L21/60;H01L21/66;H01L23/14;H01L23/538;H01L23/58;H01L25/16 主分类号 H01L21/60
代理机构 代理人
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