| 摘要 |
PURPOSE:To provide a dust-free conveyor which is suitable to conveyance of wafers, by a method wherein a conveying body, made of a high magnetic material, is installed in a high magnetic material or a high magnetic field guide in a manner that it is brought into a magnetic floating state, and the conveying body is conveyed by means of an external magnetic field. CONSTITUTION:An injection-molded conveying body 2 of rare earth magnet is located in an injection-molded guide 3 of rare earth magnet in a manner that it is brought into a magnetic floating state, and an Si wafer cassette 1 is placed within the conveying body 2. The conveying body 2 is conveyed along the guide 3 as a magnetic field is changed by means of an external magnet 4. This constitution enables to perform dust-free conveyance. |
