| 摘要 |
PURPOSE:To prevent the deterioration of the mark detecting precision by a method wherein the aligning mark with a step difference part is made of a material of a density smaller than that of the material being used for the substrate. CONSTITUTION:A reflected electron signal reflected from a high-density material, such as gallium arsenide, gold, silver, molybdenum and so forth, undergoes a large fluctuation in the amount of reflected electrons due to the roughnesses of the materials. Therefore, the fluctuation of the reflected electron amount changes largely not only in the edge part of an aligning mark but also in the other parts of the mark. As a result, the S/N is lowered. Thereupon, the surface of an aligning mark part 11 consisting of a high-density material is contrived so as to coat with a coated film 12 made of a low-density material, such as silicon, silicon dioxide, aluminum and so forth. When such an aligning mark is formed, the S/N is sufficiently improved.
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