| 摘要 |
PURPOSE:To improve measuring speed and to make automatic control and operation easy without damaging the surface to be measured by mounting an optical displacement gage of a reflection type and controlling the attitude of the optical displacement gage by using a driving mechanism. CONSTITUTION:A theta shaft is driven by a servocontrol motor 9 via a gear 12 and the rotating angle thereof is detected by an angle detector 10. A beta axis is driven by a servocontrol motor 14 via a sprocket 16 and a timing belt 17 and the rotating angle thereof is detected by an angle detector 15. A gamma axis is driven by a stepping motor 18 coupled directly to a connecting rod 19 to which an optical displacement gage 6 is attached. The angle between illuminating light 7 and a measuring surface 4 can be kept within a limit by using such attitude control axes (theta, beta, gamma) and orthogonal triaxial mechanism, by which the measurement is made possible. The gamma axis does not change the position of the measuring point P and changes the direction of the light 7 and therefore the max. quantity of reflected light is obtd. by rotating the gamma axis in the case of the measuring surface having a poor reflection characteristic. The measurement of such surface is thus made possible. |
