| 摘要 |
PURPOSE:To improve an ionization rate of a cluster beam ever so better, by focusing electrons on the cluster beam with an electric field, while curing an electron orbital with a magnetic field, in case of an electron shower for ionization of the cluster beam. CONSTITUTION:A bar electrode 11 is installed on a central axis of a passing orbit of a cluster beam, and a potential difference is given to space between the electrode 11 and a drawer electrode 7 from a power source 12 whereby an electric field is formed in space between the bar electrode 11 and the drawer electrode 7. In addition, a coil 13 is installed in position outside a cluster ionizing electrode and an electric current is made to flow therein, whereby a magnetic field is formed in an orbital direction of the cluster beam, namely, in a vertical direction. With this constitution, electrons are focusing toward a central axis of the passing orbit of the cluster beam as doing parallel turning motion so that ionization efficiency in the cluster beam is thus improved. |
