| 摘要 |
PURPOSE:To enable to mass-produce semi-plane type Josephson junctions, which have all an even critical current, by a method wherein a material for the weak coupling part is deposited by performing a sweep, the material is detected at a point when the material was deposited in a prescribed amount, and when the resistivity of the deposited material reached a prescribed value, the sweep is stopped and the weak coupling part is formed. CONSTITUTION:A laminated material is disposed in the gaseous atmosphere of a compound including the element of a material for a weak coupling part 4, which is attemped to form. A beam having an energy, which is enough to disengage the chain combination of the compound and is enough to enable to liberate the element of the material for the weak coupling part, is injected in the side surfaces of the thickness of an insulating layer made to expose betwen the two superconductive thin films through the gaseous atmosphere, the linear sections crossing the side surfaces of the thickness are swept, the material for the weak coupling part 4 is deposited by being performed this sweep and the weak coupling part 4 is formed. A constant deposited amount of the material, that is, a weak coupling part of a constant height or a constant width, is formed by precisely controlling the sweep time and the Josephson Junctions, which have all an even critical current, are produced. However, for making uniform strictly the critical current, it is done in such a way that when the resistivity of the deposited material for the weak coupling part reached a prescribed value while the resistivity is metered, the sweep is stopped and the weak coupling part is formed. |
