| 摘要 |
The invention relates to a sensor having a nozzle arrangement which is provided with at least one flow duct (4), and a semiconductor pressure sensor (6). According to the invention, the signal channel (2), the plurality of flow ducts (4) arranged at least approximately concentrically with respect to the signal channel (2), and the semiconductor pressure sensor (6) consist of a common, integrated design made from silicon. This configuration produces a sensor chip having an edge length of, for example, approximately 4 mm whose response time is, for example, at most approximately 5 msec. <IMAGE>
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