| 摘要 |
PURPOSE:To provide a titled device which enables vapor deposition of multiple layers without damaging the vapor deposition surface of a belt-like base body by the constitution in which a patterning tape is surely attached and detached to and from the belt-like base body by a roller system contg. an attaching and detaching roller and a tension roller. CONSTITUTION:A vacuum deposition device consists in transferring a belt-like base body 10 consisting of a plastic film or the like while bringing said body into contact with the cylindrical surface 13 of a cooling drum 12 by guiding and deflecting rollers 11, 14 in a vacuum, guiding a flexible sheet-like patterning tape 15 by a roller system 17 including attaching and detaching rollers 20, 21, and a tension roller 25 and deposits a material for vapor deposition such as Al or the like evaporated from an evaporating source 18 via the tape 15 onto the body 10 by evaporation while progressing synchronously said tape in contact with the body 10. The above-mentioned rollers 20, 21 and roller 25 of such vapor deposition device are attached to turning arms 24, 23, 27 rotating respectively around turning shafts 22, 21, 26 and are thus provided movably. The tape 15 is constituted attachably and detachably to and from the body 10. |
